ISO 5 - ISO 9 Electronic Clean Room

Electronic clean room is currently an indispensable and important facility in semiconductor, precision manufacturing, liquid crystal manufacturing, optical manufacturing, circuit board manufacturing and other industries. In recent years, due to the innovation and development of technology, the demand for high precision and miniaturization of products has become more urgent. For example, the research and manufacturing of ultra-large integrated circuits has become a project that worldwide countries attach great importance to in the development of science and technology.

Electronic clean room generally include clean production areas, clean auxiliary rooms (including personnel clean rooms, material clean rooms and some living rooms, etc.), air shower, management areas (including office, duty, management and rest, etc.) and equipment area (including purification air-conditioning system applications, electrical rooms, high-purity water and high-purity gas rooms, and heating and cooling equipment rooms).

 Electronic clean room HVAC system design solutions

Design solution 1: air handling unit + chiller + hepa box

This is the most traditional design solution for purification air conditioning systems. The combined air handling unit contains various functional sections, such as mixing section, primary filter section, surface cooling section, secondary return air section (or intermediate section), heating section, humidification section, medium filter section, fan section, etc. The cold source is provided by the chiller.

Solution features: It is recommended that the fresh air be concentrated and then mixed with the return air, which can reduce the cold treatment burden of the surface cooling section. This type of solution can generally be applied to purified and dust-free clean rooms with higher cleanliness levels, such as ISO 5, ISO 6, ISO 7, or ISO 8.

Design solution 2: water-cooled cabinet + pressurized air cabinet + hepa box

Compared with the previous solution, this is a relatively simple air conditioning solution. It can greatly reduce the area of the machine room. The water-cooled cabinet can be arranged in a smaller machine room or clean workshop according to specific circumstances. The pressurized air hood can also be arranged in machine room or hung in machine room or in mezzanine.

Solution features: This scheme can be either primary return air or secondary return air, depending on the size of the clean workshop. This type of solution can generally be applied to dust-free clean rooms with cleanliness levels of ISO 7 or ISO 8.

Design solution 3: split air conditioner cabinet + FFU fan filter unit

This is the simplest air conditioning solution. The split air conditioner cabinet is directly placed in clean workshop and enclosed with sandwich panels, and a return air outlet (with a primary filter) is opened on the sandwich panels at the return air outlet of the cabinet. The FFU fan filter unit is evenly arranged on the ceiling. This solution is suitable for dust-free clean room that do not have high requirements for indoor temperature and humidity accuracy.

Solution features:

1. The simple process of LCD screen making: cleaning → printing orientation film → rubbing → sealing printing layer and spreading spacers → combination → lining and cutting → LC injection → attaching polarizer → final screen making check.

2. Temperature and humidity requirements: The temperature is generally 24±2℃ and the relative humidity is 55±5%.

3. Large fresh air volume

4. Large air supply volume

Through in-depth research on the production environment of LCD electronic clean rooms and accumulation of engineering experience, we clearly understand the key to environmental control in LCD production process. Some electronic clean rooms at the end of the process are installed and their cleanliness level is generally ISO 6, ISO 7 or ISO 8. The installation of electronic clean room for backlight screens is mainly for stamping workshops, assembly and other electronic clean room for such products and their cleanliness level is generally ISO 8 or ISO 9.

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